P04200 - SEMI P42 - Specification of Reticle Data for Automatic Recipe Transfer to Wafer Exposure System StdPbc-0812 This leads to high efforts

This leads to high efforts to specify the communication structures between FPU and the FMCS

semiconductor manufacturers

SEMI G82-0301E (Reapproved 0706)

and the existing standards for performing these tests are referenced

参考までに，米国で通常使われている単位が2インチおよび3インチウェーハには用いられ，SI（メートル）単位が100 mm以上のウェーハには使われている。

P04200 - SEMI P42 - Specification of Reticle Data for Automatic Recipe Transfer to Wafer Exposure System StdPbc-0812 This leads to high effortsThis specification was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on January 9, 2004. Initially available at www. semi. org February 2004; to be published March 2004. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not