M02400 - SEMI M24 - Specification for Polished Monocrystalline Silicon Premium Wafers Revision:SEMI M24-0307 - Superseded 表面処理と表面清浄装置

表面処理と表面清浄装置

SEMI S2-0712c (delayed revision)

line dimensions

This Specification does not define any new behavior required of the equipment other than that necessary for retrieving information describing equipment configuration

originally published in 1983

M02400 - SEMI M24 - Specification for Polished Monocrystalline Silicon Premium Wafers Revision:SEMI M24-0307 - Superseded 表面処理と表面清浄装置This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published in 1994; previously published November 2005. This document specifies requirements for virgin silicon premium wafers with nominal diameter from 150300 mm used for particle counting, metal