P02900 - SEMI P29 - 減衰型位相シフトマスク（ハーフトーン型位相シフトマスク）およびマスクブランクスに特有な特性の仕様 StdPbc-0822 This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on April 30

SEMI G30 — Test Method Junction-to-Case Thermal Resistance Measurements of Ceramic Packages

memory capability

orgで入手可能となる。初版は1990年発行。前版は2002年11月発行。

SEMI E125-0923 (technical revision)

P02900 - SEMI P29 - 減衰型位相シフトマスク（ハーフトーン型位相シフトマスク）およびマスクブランクスに特有な特性の仕様 StdPbc-0822 This edition was approved forglobal Micropatterning Committee200598global Audits and Reviews Subcommittee200510www. semi. org200511CD ROM19979 2005 Referenced SEMI Standards SEMI P1 Specification for Hard Surface Photomask Substrates SEMI P22 Guideline for Photomask Defect Classification and Size Definition