E08400 - SEMI E84 - エンハンストキャリア移載パラレルI/Oインタフェースの仕様 StdTpc-CIM Framework and in particular for electrical

and in particular for electrical power requirements such as those found in SEMI E51

NOTICE: This document was balloted and approved for withdrawal in 2003

本スタンダードは，IC製造工場において300 mm径ウェーハの搬送および保管に使用されるFOUPを，部分的に規定する。

This Safety Guideline applies to load ports that interface with front-opening unified pods (FOUP)

The purpose of this Specification is to standardize requirements for buffered oxide etchants used in the semiconductor industry and testing procedures to support those standards

E08400 - SEMI E84 - エンハンストキャリア移載パラレルI/Oインタフェースの仕様 StdTpc-CIM Framework and in particular for electricalglobal Physical Interfaces & Carriers Committee200994global Audits and Reviews Subcommittee200910www. semi. org200911CD ROM19996200711 AMHS: automated material handling systemsFOUPAMHSPI O SEMI E23I O Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 Wafers SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E23 Specification for Cassette Transfer Parallel I O Interface SEMI E30 Generic