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M01600 - SEMI M16 - Specification for Polycrystalline Silicon StdPbc-0714 1-0702 (technical revision)
M01600 - SEMI M16 - Specification for Polycrystalline Silicon StdPbc-0714 1-0702 (technical revision)
$193.00
Description
1-0702 (technical revision)
the equipment without exposing the cassette and wafers to outside contamination
business discussion
SEMI F49-0200 (first published)
As low stiffness can occur with any material
M01600 - SEMI M16 - Specification for Polycrystalline Silicon StdPbc-0714 1-0702 (technical revision)This Specification is intended for use in procurement of polycrystalline silicon for growth of electronic grade monocrystalline silicon ingots. Such ingots are sliced into wafers that are subsequently used for the production of semiconductor devices, integrated circuits, and other microelectronic components including microelectromechanical systems (MEMS). This Specification covers requirements for polycrystalline silicon (poly) used to produce single
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