E15300 - SEMI E153 - AMHS SEMの仕様（AMHS SEM） Revision:SEMI E153-0310 - Superseded SEMI E80-0423 (technical revision)

SEMI E80-0423 (technical revision)

SEMI MF674-0316 (Reapproved 0921)

SEMI C93-0522E (editorial change)

It also provides a uniform reporting procedure for digital roughness data that can facilitate communication between different workers and different laboratories

1 — High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)

E15300 - SEMI E153 - AMHS SEMの仕様（AMHS SEM） Revision:SEMI E153-0310 - Superseded SEMI E80-0423 (technical revision)global Information & Control Committee2010120global Audits and Reviews Subcommittee20102www. semi. org200911 AMHSSEMAMHS SEMSEMI E30AMHS SEMAMHS SEMSEMI E84 11GEMSEMI2SECS IISECSTRANSFERTSSC 11GEMAMHS SEMTSSCTRANSFERGEM Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E37 High Speed SECS Message Services