M05400 - SEMI M54 - 半絶縁性（SI）GaAs材料のパラメータのガイド Revision:SEMI M54-0304 - Superseded SEMI E142-0224 (technical revision)

SEMI E142-0224 (technical revision)

For example

SEMI E40-1218 (title change)

This Specification provides the dimensional requirements for plastic and metal wafer cassettes used for the processing and handling of 150 mm diameter HB-LED sapphire wafers conforming to the SEMI Standard

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

M05400 - SEMI M54 - 半絶縁性（SI）GaAs材料のパラメータのガイド Revision:SEMI M54-0304 - Superseded SEMI E142-0224 (technical revision)global Compound Semiconductor Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org2003320043 : nSI GaAs SI GaAs Referenced SEMI Standards SEMI M9 Specifications for Polished Monocrystalline Gallium Arsenide Slices SEMI M10 Standard Nomenclature for Identification of Structures and Features Seen on Gallium Arsenide SEMI M15 Polished Wafer Defect Limits Table for Polished Gallium Arsenide