MF207400 - SEMI MF2074 - Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers Revision:SEMI MF2074-0912 (Reapproved 0718) - Superseded SEMI E80-0299 (Reapproved 1104)

SEMI E80-0299 (Reapproved 1104)

These attributes include electrical

SEMI C38 — Guideline for Phosphorus Oxychloride

特定のラフネス測定の識別に関しての参考試験方法

SEMI C28-0704 (technical revision)

MF207400 - SEMI MF2074 - Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers Revision:SEMI MF2074-0912 (Reapproved 0718) - Superseded SEMI E80-0299 (Reapproved 1104)The diameter of semiconductor wafers is an important parameter in microelectronic fabrication. Wafer diameters must conform to the limits specified in SEMI M1; or other agreed upon limits, or product that is otherwise suitable may not fit correctly in process equipment. Cam follower edge rounding usually results in wafers that are circular. However, wafers ground with edge follower edge rounding equipment may be elliptically shaped. Measurements made