M03100 - SEMI M31 - Specification for Mechanical Features of Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers Revision:SEMI M31-0305 - Superseded SEMI MF84-0307 (technical revision)

SEMI MF84-0307 (technical revision)

Direction for improvement for equipment manufacturers will become clear

development

identifying resistivity as an essential material parameter

This Specification covers requirements for all grades of dichlorosilane (SiH2Cl2) used in the semiconductor industry

M03100 - SEMI M31 - Specification for Mechanical Features of Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers Revision:SEMI M31-0305 - Superseded SEMI MF84-0307 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the front opening shipping box (FOSB) used to ship 300 mm wafers from wafer suppliers to their customers (typically IC manufacturers), while maintaining wafer quality. This Standard is intended to