M01300 - SEMI M13 - シリコンウェーハの英数字マーキングの仕様 Revision:SEMI M13-0706 - Superseded procedure or instrumentation that can

procedure or instrumentation that can measure the needed film property or characteristic with sufficient precision and spatial resolution to reveal the needed information on spatial nonuniformity of the film

The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications Standard 2 Message Content (SECS-II) host that complies with the SEMI E30 model

device manufacturers can automate semiconductor factories more quickly and effectively

product types

• reconstruct the edge profile using the extracted characteristics

M01300 - SEMI M13 - シリコンウェーハの英数字マーキングの仕様 Revision:SEMI M13-0706 - Superseded procedure or instrumentation that canglobal Traceability Committee2006516global Audits and Reviews Subcommittee20066www. semi. org20067CD ROM1988200311 OCR Referenced SEMI Standards None.