F02100 - SEMI F21 - 清浄な環境における空気を媒体とする分子汚染レベルの分類 StdTpc-Package Test Methods This Document covers requirements for

This Document covers requirements for hydrogen chloride used in the semiconductor industry

SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Carriers

0008 and 2000 Ω·cm for p-type silicon and between 0

and other components as a measure of the effectiveness of passivation

concerned with management of the availability of qualified factory personnel

F02100 - SEMI F21 - 清浄な環境における空気を媒体とする分子汚染レベルの分類 StdTpc-Package Test Methods This Document covers requirements forNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Facilities CommitteeNorth American Facilities Committee2002829 North American Regional Standards Committee20029www. semi. org2002111995 1 Referenced SEMI Standards None.