P04700 - SEMI P47 - ラインエッジラフネス（Line Edge Roughness）およびライン幅ラフネス（Line Width Roughness）測定の試験方法 StdPbc-0218 The source is normally a

The source is normally a polarized laser beam in combination with a high-contrast prism polarizer

and Safety Guideline for Semiconductor Manufacturing EquipmentSEMI S4 — Safety Guideline for the Separation of Chemical Cylinders Contained in Dispensing CabinetsSEMI S5 — Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder ValvesSEMI S6 — Environmental

stroboscopic interferometer or comparable instrument that is capable of obtaining the resonance frequency of a beam oscillating out-of-plane

equipment and testing to ensure an unified terminology for this technology

26-84 (first published)

P04700 - SEMI P47 - ラインエッジラフネス（Line Edge Roughness）およびライン幅ラフネス（Line Width Roughness）測定の試験方法 StdPbc-0218 The source is normally aglobal Microlithography Committee20061121global Audits and Reviews Subcommittee20072www. semi. org20073CD ROM IC Referenced SEMI Standards SEMI P19 Specification for Metrology Pattern Cells for Integrated Circuit Manufacture SEMI P35 Terminology for Microlithography Metrology SEMI P36 Guideline of Magnification Reference for Critical Dimension Measurement Scanning Electron Microscopes