M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド StdTpc-Stainless Steel Components SEMI MF1811-1109 (technical revision)

SEMI MF1811-1109 (technical revision)

Specification and Guide for Boron Trichloride (BCI3)

These characteristics and behaviors are required to be implemented

SEMI C27-0699 (first published - replaces SEMI C1

and completion of automated and manual carrier transfers to and from the equipment and

M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド StdTpc-Stainless Steel Components SEMI MF1811-1109 (technical revision)global Silicon Wafer Committee20101221global Audits and Reviews Subcommittee20112www. semiviews. org www. semi. org2001320053 1107 cm 1IOC 88 1,2 1970 Referenced SEMI Standards SEMI M59 Terminology for Silicon Technology SEMI MF1188 Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption with Short Baseline