C03900 - SEMI C39 - Specification for Potassium Hydroxide Pellets StdVol-Photovoltaic org in October 2018

org in October 2018

described by a third entity) is outside the scope of this Standard

and valves)

本テスト方法の目的は，半導体処理装置の高周波 (RF) 電力供給システムで使用されるRF電源の出力を測定する正確な方法を提供し，SEMI E113をサポートすることである。

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

C03900 - SEMI C39 - Specification for Potassium Hydroxide Pellets StdVol-Photovoltaic org in October 2018NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for potassium hydroxide pellets used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown