C00300 - SEMI C3 - ガスの仕様 Revision:SEMI C3-0812 - Superseded RF MEMS switches

RF MEMS switches

Potential methods for abating emissions of gaseous and particulate contaminants exhausted from semiconductor manufacturing operations at "End-of-Pipe"

This specification was technically approved by the Global Flat Panel Display – Equipment Committee and is the direct responsibility of the North American Flat Panel Display Committee

SEMI MF533-1109 (technical revision)

SEMI M51 — Test Method For Characterizing Silicon Wafers by Gate Oxide Integrity

C00300 - SEMI C3 - ガスの仕様 Revision:SEMI C3-0812 - Superseded RF MEMS switchesglobal Gases Technical Committee2012618global Audits and Reviews Subcommittee20128www. semiviews. org www. semi. org198119996 The Gases Technical Committee SEMI1979 SEMI SEMI C3 Referenced SEMI Standards None.