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G00600 - SEMI G6 - 検査方法　封止リング平坦度 StdTpc-Physical Interfaces It also provides guidance for

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It also provides guidance for interface design

and tubing as specified in ASTM A269 and ASTM A632

Referenced SEMI StandardsSEMI E4 — Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI MF928-0317 (Reapproved 0622)

この文書は，その他の

G00600 - SEMI G6 - 検査方法　封止リング平坦度 StdTpc-Physical Interfaces It also provides guidance for38. 382 mm0. 330 8. 382 mm0. 330 Referenced SEMI Standards None.

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