E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Revision:SEMI E171-0524 - Current Consequently

Consequently

SEMI MF657 — Test Method for Measuring Warp and Total Thickness Variation on Silicon Slices and Wafers by a Noncontact Scanning Method

2 The GEM Standard is intended to specify the following:

They can be added according to customers’ demands or manufacturing problems

The common components are used in association with other XML documents or schemas generated as part of the XML based SEMI Standard Interface Specifications

E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Revision:SEMI E171-0524 - Current ConsequentlyThe purpose of this Standard is to provide a communication scheme for exchanges of carrier logistics related information, especially predictive information, between equipment and the factory system in order to support seamless cascading of carriers for continuous processing of equipment in semiconductor fabrication systems or similar ones. The purpose of this Standard is to provide models which represent carrier logistics management status in