E02400 - SEMI E24 - Cluster Tool Module Interface: Isolation Valve Interlocks Standard StdPbc-0423 previously published June 2012

previously published June 2012

1  The scope of this Specification and Guide is two Grades and three Tiers of sulfuric acid used in the semiconductor industry

If epitaxial silicon is used

SEMI PV87-1018 (Reapproved 0124)

メッセージ交換は，トランザクションプロトコルと呼ばれる手順により実行される。SECS-IIを採用する装置に対しては，このトランザクションプロトコル上からの最小限の要求がある。

E02400 - SEMI E24 - Cluster Tool Module Interface: Isolation Valve Interlocks Standard StdPbc-0423 previously published June 2012This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www. semi. org in June 2010. Originally published in 1992; previously published July 2004. NOTICE: This document was balloted and approved for withdrawal in 2010. The purpose of this standard is to prevent any opening or closing of