M03100 - SEMI M31 - 300 mmウェーハの搬送および出荷用フロントオープニング・シッピングボックスの機械仕様 Revision:SEMI M31-0708 - Superseded This edition was approved for

This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30

マテリアル搬送・格納コンポーネントの範囲には，下記のインタフェースが含まれる。

Originally published in 1986

SEMI F57 — Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

and the mutual positional relationship required to describe each position when AMHS loads and unloads the substrate to or from the manufacturing equipment

M03100 - SEMI M31 - 300 mmウェーハの搬送および出荷用フロントオープニング・シッピングボックスの機械仕様 Revision:SEMI M31-0708 - Superseded This edition was approved forNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Silicon Wafer Global Technical Committee200853global Audits and Reviews Subcommittee20086www. semi. org199820073 IC300 mm (front opening shipping Box: FOSB) FOSBFOSB FOSBICFOSBFOUPFOBITICFOSBFOUPFOBIT 5. 4FOSB 5. 4. 1 5. 4. 2