E18000 - SEMI E180 - 通过ICP-MS测量半导体晶圆加工过程中关键腔室部件表面金属污染的试验方法 StdPbc-1115 SEMI MF951-0305 (Reapproved 0316)

SEMI MF951-0305 (Reapproved 0316)

It has been replaced by SEMI F119

This Standard applies to two-port/four-fastener components (except mass flow controllers and mass flow meters)

and health programs

technicians or any individual working directly with this equipment or product

E18000 - SEMI E180 - 通过ICP-MS测量半导体晶圆加工过程中关键腔室部件表面金属污染的试验方法 StdPbc-1115 SEMI MF951-0305 (Reapproved 0316)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. ICP MSCCCsCCC CCC CCC ICP MSCCCs CCC AlNaKCaLiFeCuNiCrCoTiMgZn