F01400 - SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures volume-C SEMI F31-0313 (technical revision)

SEMI F31-0313 (technical revision)

このマーキングシンボルは，ユーザのパターンプロセスに影響しない方法と位置でマークされる。

SEMI M1-0309E (editorial revision)

including manufacturers of the basic test instrumentation to be used

This Practice does not deal with acquisition or analysis of uniformity data where it is desired to take more than one measurement per specified spatial cell such as is commonly done for wafer site flatness measurements

F01400 - SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures volume-C SEMI F31-0313 (technical revision)This standard was technically reapproved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on December 18, 1998. Initially available on www. semi. org February 1999; to be published June 1999. Originally published in 1993. Editorial changes were made to 3. 1. 1, 6. 2. 1, and 6. 2. 2. This document summarizes gas