M07400 - SEMI M74 - 直径450mmメカニカルハンドリング鏡面ウェーハの仕様 Revision:SEMI M74-1108 - Superseded such as SEMI M1 or

such as SEMI M1 or SEMI M9

org in March 2010

SEMI E28-92 (Reapproved 0710)

SEMI T20-0710 (Reapproved 0416)

This will facilitate comparison of test results among worldwide laboratories used for monitoring or qualifying PV polysilicon and other PV silicon materials

M07400 - SEMI M74 - 直径450mmメカニカルハンドリング鏡面ウェーハの仕様 Revision:SEMI M74-1108 - Superseded such as SEMI M1 orglobal Silicon Wafer Committee2008829global Audits and Reviews Subcommittee200810www. semi. org200811CD ROM 450mmAMHS450mm450mm 450mm 5 SISystem International Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M20 Practice for Establishing a Wafer Coordinate System SEMI M59 Terminology for Silicon Technology SEMI MF533 Test Method for Thickness and Thickness Variation of Silicon Wafers SEMI MF928 Test