Plasma-Therm 81539 Cassette Module Interlock Board PCB Clusterlock 7000 Spare Model No: Precision 5000 CVD

Model No: Precision 5000 CVD

Part No: CQM1-TC101

5080-192379-11 GEAR SCRA-THETA-32-0 1

May Require Calibration This Tylan FM-3900MEP Mass Flow Controller MFC is used working surplus

Model No: 4S015-448-ACP-112C-1

Plasma-Therm 81539 Cassette Module Interlock Board PCB Clusterlock 7000 Spare Model No: Precision 5000 CVDPlasma Therm 81539 Cassette Module Interlock Board PCB Clusterlock 7000 Spare Inventory # 18192 Part No: 81539 Model No: Cassette Module Interlock Removed from a Plasma Therm Clusterlock 7000 PM RIE Reactive Ion Etching System This Plasma Therm 81539 Cassette Module Interlock Board PCB Clusterlock 7000 Spare is used working surplus. Removed from a Plasma Therm Clusterlock 7000 PM RIE Reactive Ion Etching System. The physical condition is good, but