E17800 - SEMI E178 - Guide for EDA Freeze Version Revision:SEMI E178-0120 - Superseded Use of phase diagrams for

Use of phase diagrams for alloy and heat treatment design

it is anticipated that most device manufacturers will require most of the GEM capabilities that apply to a particular type of equipment

This Test Method is specifically directed to the notch dimensions specified in SEMI M1

Materials kinds or cleanliness are not defined

SEMI 3D14-0523 (technical revision)

E17800 - SEMI E178 - Guide for EDA Freeze Version Revision:SEMI E178-0120 - Superseded Use of phase diagrams for* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1