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Philips PG3652 Processor PCB Card AN PIO ASML 4022.430.1670 PAS 5000/2500 Used Made in Japan This TELPhilips PG3652 Processor PCB Card AN PIO ASML 4022. 430. 1670 PAS 5000 2500 Used Inventory # 17523 This Philips PG3652 is used working surplus. The physical condition is good, but there are signs of previous use and handling. Removed from a ASML PAS 5000 2500 Wafer Stepper System. Specifications Part No: PG3652 Model No: AN PIO ASML Part No: 4022. 430. 1670, 4022. 422. 7588 Removed from a ASML PAS 5000 2500 Wafer Stepper System Made in the UK Sale