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Flex Electronics Webinar Master Class: July 2020 (On Demand) StdTpc-Unclassified E This standard was editorially

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E This standard was editorially modified in October 2009 to correct editorial errors

This Document defines a communication specification based on the MECHATROLINK protocol to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment

SEMI MF1569-0307 (Reapproved 1023)

at the same time

orgで,そして2009年11月にCD-ROMで入手可能となる。初版は2007年3月発行,前版は2008年11月に発行された。

Flex Electronics Webinar Master Class: July 2020 (On Demand) StdTpc-Unclassified E This standard was editoriallyClick here for Event Details

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