E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization StdTpc-Process Chemicals - Bases SEMI E87-0707 (technical revision)

SEMI E87-0707 (technical revision)

- Common approaches for defining specific elements of equipment metadata

Recommendations are made based on the cited literature

BWSs may be classified as either temporarily bonded (i

and behavior are not required to be compliant to this Specification

E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization StdTpc-Process Chemicals - Bases SEMI E87-0707 (technical revision)1 Purpose 1. 1 This Specification establishes a common basis for communication between users and suppliers of manufacturing equipment in the semiconductor and related industries by providing a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment. 2 Scope 2. 1 This Specification defines six mutually exclusive, basic equipment states for all of