S02100 - SEMI S21 - 人員防護安全基準 Revision:SEMI S21-1106E - Superseded SEMI E62 — Provisional Specification

SEMI E62 — Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

Where material contains other material (such as carriers containing wafers)

ロード，アンロード状態

SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O interface

1-1015 — Specification for Cluster Tool Module Interface 300 mm: Transport Module End Effector Exclusion Volume

S02100 - SEMI S21 - 人員防護安全基準 Revision:SEMI S21-1106E - Superseded SEMI E62 — Provisional SpecificationFPD This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 24, 2006. It was available at www. semi. org in October 2006. Originally published October 2003. E This standard was editorially modified in February 2007 to correct an error. Changes were made to 7. 2. 3. This safety guideline identifies preferred