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Varian Semiconductor Equipment E11139290 PDI Module PCB Card E15005320 Working Made in Japan This NikonVarian Semiconductor Equipment E11139290 PDI Module PCB Card E15005320 Working Part No: E11139290 Model No: PDI MODULE PCB Part No: E15005320 This item is working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 14"x14"x14" @ 8 lbs. Shipping Terms: All Domestic and International shipping quotes and or fees