M02100 - SEMI M21 - カーテシアン（デカルト）アレイにおける方形エレメントへの割当アドレスのガイド Revision:SEMI M21-1110 - Superseded use of or logic associated

use of or logic associated with the defined physical features are given in this Specification

This Guide covers angle resolved light scatter (ARLS) measurements performed on monocrystalline (also known as single crystal) and multicrystalline (also known in some regions as polycrystalline) semiconductor wafer surfaces

本基準包括下列章節：

SEMI G4-89 (technical revision)

Products which meet all of the requirements may be described as ‘meeting SEMI Specifications

M02100 - SEMI M21 - カーテシアン（デカルト）アレイにおける方形エレメントへの割当アドレスのガイド Revision:SEMI M21-1110 - Superseded use of or logic associatedglobal Silicon Wafer Committee2010827 global Audits & Reviews Subcommittee201010www. semi. org199220043 Referenced SEMI Standards SEMI M1 Specifications for Polished Single Crystal Silicon Wafers SEMI M17 Guide for a Universal Wafer Grid SEMI M20 Practice for Establishing a Wafer Coordinate System SEMI M59 Terminology of Silicon Technology