Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE 3 Dimensions

3 Dimensions

weekly and regular control

a) users with an application independent generic cabling system and an open market for cabling components

by testing with a single specified load applied to the stylus to assess compliance with a particular specification

Electromagnetic compatibility (EMC) - Part 6-1: Generic standards – Immunity for residential

Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE 3 DimensionsWhat is this standard about? This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.