Thick Aluminum Nitride Substrate for RTP Furnace's Sample Holder - EQ-AIN-Holder Orientation 10-14 Stainless steel torsion clips hold

Stainless steel torsion clips hold the bonnet assembly firmly in place and allow quick access for maintenance cycles

005 Cu (wt%) <0

Vacuum chuck Dimensions: 370mm(L) x 200mm(W)

1100°C ( continuous)

Surface Roughness:   Fine ground

Thick Aluminum Nitride Substrate for RTP Furnace's Sample Holder - EQ-AIN-Holder Orientation 10-14 Stainless steel torsion clips holdSuch unpolished Aluminum Nitride can be placed in the center of holder for holding test samples up to 3" or 5" diam. The excellent temperature uniformity can be achieved in this 3" or 5" diam. area due to the benefit from its high thermal conductivity. Aluminum Nitride Ceramic Substrates Properties Item No. AIN Holder Purity (wt%) 99% (AN5116) Density (g cm3) >3. 26 Thermal Conductivity (W m. K) >170 Thermal Expansion (x10 6 oC) <4. 2 Dielectric