Surface chemical analysis. Depth profiling. Measurement of sputtering rate. Mesh-replica method using a mechanical stylus profilometer Ingestion-build-48068 Efficiency

Efficiency

Contents of BS ISO 8789:

such that the operational and functional integrity of the overall pipework system is maintained

ISO 3740 on determination of sound power levels is useful for:

BS 8414-1:2019 supersedes BS 8414-1:2015+A1:2017

Surface chemical analysis. Depth profiling. Measurement of sputtering rate. Mesh-replica method using a mechanical stylus profilometer Ingestion-build-48068 Efficiency1 Scope This Technical Report describes a method for determining ion sputtering rates for depth profiling measurements with Auger electron spectroscopy (AES) and X ray photoelectron spectroscopy (XPS) where the specimen is ion sputtered over a region with an area between 0,4 mm2 and 3,0 mm2. This Technical Report is applicable only to a laterally homogeneous bulk or single layered material where the ion sputtering rate is determined from the sputtered